PRODUCTS
TGV and Advance Packaging
specification
Features
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Exposure energy adjustable
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Panel cooling system
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Energy compensation can extend lamp lifetime
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Applicable to single/double-sided
Automation
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Comply with SECS/GEM standards
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Load and unload panels by EFEM
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Capable of handling 0.2-3mm glass panel
Safety audit
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Comply to SEMI S2, S8 standards
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Comply to CE, UL standards