PRODUCTS
TGV and Advance Packaging
Instructions
Features
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Applied to lamination process on CCL and glass panel
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Applied to DFR, Protective-film, PET-film lamination process
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Defect free, no wrinkles and bubbles
Automation
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Load and unload panels by EFEM
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Recipe selections and records saved in tool PC
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Comply with SECS/GEM standards
Accuracy
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Aligned by CCD-camera assist system
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Leading and trailing edge can reach +/-1mm accuracy
Panel Handling
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No scratches on glass panel by soft material contact
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No scratches and cracks on 200um glass
Safety audit
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Comply to SEMI S2, S8 standards
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Comply to CE, UL standards