PRODUCTS
TGV and Advance Packaging
Automatic Baking System
Group Up's baking equipment has a precise temperature control system that can set the heating and cooling speeds and thermal energy for different materials.
Group Up has rich experience in software and hardware.
Integrates EFEM automation system, and complies with SECS/GEM300 specifications.
Can be used for APL pre-baking, Sintering pre-heating, Annealing baking, ABF baking, Sputter water removal baking before coating, Photoresist/Dielectric pre-baking and post-baking and PEB, Molding post-baking
Group Up has rich experience in software and hardware.
Integrates EFEM automation system, and complies with SECS/GEM300 specifications.
Can be used for APL pre-baking, Sintering pre-heating, Annealing baking, ABF baking, Sputter water removal baking before coating, Photoresist/Dielectric pre-baking and post-baking and PEB, Molding post-baking
Instructions
Features
- Temperature setting can reach Max. 500℃
- Capable of handling 0.2mm glass panel, no scratches and cracks
- Patented unique flow design to heat up panel fast with better uniformity
Automation
- Jig frame loading the panel, lot baking, jig frame unloading the panel, full-line integration
- Comply to SECS/GEM standards
- Load and unload panels by EFEM
JIG Features
- Avoid vibration causing thin wire broken or embedded wire broken
- Reduce panel warpage by clamp holding panel during heating process
Railway Guide Vehicle Robot Handling
- Robot moving smoothly with heavy load, no shaking and vibration
- Jig can be transported steady at higher position by robot
- Robot fork can fit the difference between each chambers by teaching position
Safety audit
- Comply to SEMI S2, S8 standards
- Comply to CE, UL standards
